首页> 外国专利> HIGH ACCURACY RING LASER INTERFEROMETER BASED ON EXTERNAL CAVITY RING LASER

HIGH ACCURACY RING LASER INTERFEROMETER BASED ON EXTERNAL CAVITY RING LASER

机译:基于外腔激光的高精度环激光干涉仪

摘要

To output the two part of the opposite directions proceeding the beam in the ring laser through the ring laser mirror Using this external reflector to thereby introduced into the re-create the ring laser cavity in the rear traveling wave (back travelling wave) lock-in zone (lock-in zone) wide, and at the same time the distance between the external reflector and the ring laser, that is the length (optical path length) of the two opposite direction traveling wave beam intensity (intensity) and phase change (phase change) of the varied by controlling by a measured amount of the optical path ring laser interferometer according to the measured interferogram (interference fringe) can change (variation) of using it for measuring the measured quantity and a method using the same. Placing an attenuator between the outer reflector and the ring laser is to operate only in the lock-in zone to zone, ring laser by enabling to adjust the intensity of the backward traveling wave on the outside.; Displacement (displacement), the length (length), the location (position), temperature (temperature), a refractive index (refractive index), can be the amount of the various physical quantities to be measured (physical quantity) such as a pressure (pressure). The output of the interferometer of the present invention is the rate of change of the two opposite direction traveling wave interference pattern by output sum and difference and phase difference between the beam intensity (phase difference) of the applied Some of these are negative feedback (negative feedback) variations in the voltage, and other to suppress or cancel the ring laser output beam intensity, and frequency change caused by the external influence, thereby enabling a high degree of measurement. In addition, because the ring laser operating in lock-zone effects the fine movement of the ring laser on the measured amount can also be minimized.
机译:为了输出相反方向的两个部分,环形激光束中的光束将通过环形激光镜前进。使用该外部反射镜,从而将其引入后行波(后行波)锁定中,从而重新创建环形激光器腔区域(锁定区域)宽,同时外部反射器和环形激光器之间的距离,即两个相反方向的行波光束强度(强度)和相位变化(通过根据测量的干涉图(干涉条纹)通过控制光路环形激光干涉仪的测量量来改变(相位变化)及其用于测量测量量的方法(方法)。在外反射器和环形激光器之间放置一个衰减器,只能在锁定区域之间进行操作,即通过调整外部反向传播波的强度来实现环形激光器。位移(位移),长度(长度),位置(位置),温度(温度),折射率(折射率)可以是要测量的各种物理量(物理量)的量,例如压力(压力)。本发明的干涉仪的输出是两个相反方向的行波干涉图样的变化率,其乘积与所施加的光束强度(相位差)之间的差和相位差以及输出和,以及其中的一些是负反馈(负)有关。反馈电压的变化等,以抑制或消除环形激光器输出光束的强度,以及由外部影响引起的频率变化,从而实现高度测量。另外,由于在锁定区域中操作的环形激光器会影响环形激光器在被测量上的精细运动,因此也可以最小化。

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