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AUTO TEACHING COMPENSATION APPARATUS FOR SEMICONDUCTOR MAPPING SYSTEM

机译:半导体制图系统的自动教学补偿装置

摘要

The present invention is to sense whether the present invention relates to automatic teaching correction apparatus of the semiconductor mapping equipment, the invention is oscillated in both from the laser oscillator passes through the wafer cassette is placed on either side of the laser oscillator, the wafer is accommodated in each wafer cassette and a plurality of mapping sensors each having a light receiving portion, each mapping the soon as the reference piece mounted respectively on the center of each mapping sensor as well as that maps the light emitting portion and the light receiving sensor to sense the position of the via whether blocked by each of the reference side is provided, each the mapped so as based on the information sensed by and of one or two which are respectively mounted on both sides of the sensor pairs of photosensors, each of said photosensor pulse steps are respectively controlled to rotate the respective mapping sensor on the plane matches the both mapping sensor by including a plurality of step motors which are respectively attached to the sensor, the robot unit It may be mapped to time to correct the position of the seneot twisted using a step motor so as to automatically correct the position of the mapping sensor, as well as the accurate calibration and also shorten the work time required for this place during assembly.
机译:本发明是要感测本发明是否涉及半导体测绘设备的自动示教校正装置,本发明是将两者振荡从激光振荡器穿过晶片盒放置在激光振荡器的两侧,容纳在每个晶片盒中的多个映射传感器分别具有光接收部分,每个映射传感器将参考件分别安装在每个映射传感器的中心,并且将发光部分和光接收传感器映射到每个感测通孔的位置是否被参考侧的每一个遮挡,每个映射都基于分别安装在光电传感器对的两侧的一个或两个的感测到的信息进行映射。分别控制光传感器脉冲步长,以使相应的映射传感器在与两个映射对象匹配的平面上旋转通过包括分别连接到传感器的多个步进电动机,机器人单元可以被映射到时间以校正使用步进电动机扭转的塞内特的位置,从而自动地校正映射传感器的位置,如以及精确的校准,还缩短了组装过程中该位置所需的工作时间。

著录项

  • 公开/公告号KR100302603B1

    专利类型

  • 公开/公告日2001-09-26

    原文格式PDF

  • 申请/专利权人 NULL NULL;

    申请/专利号KR19990001655

  • 发明设计人 신광호;

    申请日1999-01-20

  • 分类号H01L21/68;

  • 国家 KR

  • 入库时间 2022-08-22 01:12:08

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