ANALYZING APPARATUS OF ORGANIC SUBSTANCE ADHERING TO A SURFACE OF A SAMPLE AND METHOD FOR ANALYZING ORGANIC SUBSTANCE

摘要

The local organic matter adhering to the surface of a sample such as a wafer is analyzed and its identification and quantification are performed.;The sample placed in the chamber is heated on its back or surface, the degassed gas is collected, and gas analysis is performed. The heating means uses a lamp, a laser, an electron beam, or the like, and locally heats the region to be analyzed, thereby locally degassing it. Or the whole surface is heated, degassing gas is collected for every surface area, and gas analysis is performed.