Method for optimizing and analyzing the efficiency of an equipment and apparatus for analyzing the efficiency of the equipment

摘要

The present invention obtains a target value for the performance of the equipment by modeling the operating state of the semiconductor manufacturing equipment, and the equipment efficiency optimization method for determining the priority of resource input by analyzing the difference between the target value and the actual measurement value and equipment efficiency analysis apparatus for the same It is about.;In accordance with the present invention, there is provided a method for optimizing facility efficiency, comprising: (a) modeling a facility uptime for a given facility by subdividing it into value operation items and a plurality of performance loss items; (b) calculating, as basic data, a loss of performance time corresponding to items of the modeled loss of performance items that are independent of dynamic variables whose values change according to the operating environment of the facility; (c) simulating the operation of the plant using values and basic data corresponding to the dynamic variables and calculating a target for the plant's performance; (d) measuring actual plant uptime for the plant to calculate actual measurements of the plant's performance corresponding to targets for the plant's performance; And (e) prioritizing resource input by comparing gaps between target values and actual measurements.;According to the present invention, the performance loss factors of the facility can be classified in detail, and the target value and the performance value for each factor can be compared and analyzed to systematically remove or reduce the performance loss factor, thereby improving productivity through performance improvement.