首页> 外国专利> Determining thickness of metal oxide layer on substrate made from metal in form of nuclear fuel rod comprises using electromagnetic alternating field

Determining thickness of metal oxide layer on substrate made from metal in form of nuclear fuel rod comprises using electromagnetic alternating field

机译:确定由核燃料棒形式的金属制成的基板上的金属氧化物层的厚度包括使用电磁交变场

摘要

Process for determining the thickness of one or more layers lying over each other on a substrate comprises producing an electromagnetic alternating field close to the outermost layer; measuring the effects of the fluidized currents produced on the alternating field; and determining the thickness of the layer(s). Measurements are carried out by adjusting the frequency of the alternating field to two different values so that the alternating field resulting from the effects of the fluidized currents is measured at theses frequency values and the thickness of the layer(s) calculated based on the data as well as the electromagnetic properties of the substrate and the layer(s). An Independent claim is also included for a device for carrying out the process. Preferred Features: Measurement of the alternating field is carried out in the frequency region of 500 kHz to 10 MHz.
机译:用于确定在基板上彼此叠置的一层或多层的厚度的方法包括:在最外层附近产生电磁交变场;测量产生的流化电流对交变场的影响;并确定层的厚度。通过将交变场的频率调整为两个不同的值进行测量,以便在这些频率值下测量流化电流的影响所产生的交变场,并根据以下数据计算层的厚度:以及基底和层的电磁特性。还包括用于执行该过程的设备的独立权利要求。优选特征:交变场的测量在500 kHz至10 MHz的频率范围内进行。

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