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A method and device for determining the measuring uncertainty with x-ray fluorescence - layer thickness measurements
A method and device for determining the measuring uncertainty with x-ray fluorescence - layer thickness measurements
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机译:用x射线荧光层厚度测量确定测量不确定度的方法和装置
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摘要
A measuring uncertainty evaluation method uses a simulation spectrum corresponding to the fluorescence spectrum for a given measured layer thickness, with a random generator distributing random numbers to each channel of the radiation spectrum and calculation of the standard deviation in the obtained thickness measurements, for indication of the measuring uncertainty.
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