Device for generating plasma in treatment chamber has dividing plate between treatment chamber, antenna chamber in which plasma is not generated owing to higher pressure/gas filling

摘要

The device has at least one flat antenna (7) separated from the treatment chamber (15) by a non-conducting body in the form of a dividing plate (8) between the treatment chamber and an antenna chamber (4) in which plasma is not generated as a result of a higher pressure and/or a gas filling. The antenna is mounted in the antenna chamber independently of the dividing plate.