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Individual electron transfer structure comprises excited, mechanically-oscillating resonator with conductive regions, between electrodes
Individual electron transfer structure comprises excited, mechanically-oscillating resonator with conductive regions, between electrodes
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机译:各个电子传输结构包括电极之间的带有导电区域的机械振动谐振腔
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摘要
A resonator (14) between two spaced electrodes (11, 12) is excited into mechanical vibration. To this end, the resonator is conductive near the electrodes. An Independent claim is included for the method of manufacture, employing wet etching.
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