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Pressure measurement element is component of semiconductor wafer whose base surface is fully joined to body of same or approximately same dimensions, different coefficient of elasticity
Pressure measurement element is component of semiconductor wafer whose base surface is fully joined to body of same or approximately same dimensions, different coefficient of elasticity
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机译:压力测量元件是半导体晶片的组成部分,其底面完全接合到相同或近似相同尺寸,不同弹性系数的物体上
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摘要
The device has a piezoresistive semiconducting element (3) that is a component of a semiconductor wafer (2) whose base surface is fully joined to a body (4). The base surface of the wafer and the body are of the same or approximately the same dimensions and their coefficients of elasticity are different. The wafer can consist of monocrystalline silicon or silicon carbide.
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