Terahertz radiation source used in material science has fastening units which are provided for fixing semiconductor wafer at electrodes and for providing large surface contact between electrodes and wafer

摘要

The fastening units (5,6,7) are provided for fixing a semiconductor wafer (4) at the electrodes (2,3) and for providing a large surface contact between the electrodes and the semiconductor wafer. The semiconductor wafer which serves as a radiation emitter is excited by the laser and biased via the electrodes. The electrodes are formed as large surface holders for the wafer.