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High frequency plasma source with support for field coil, gas distribution and plasma jet extraction, has additional high frequency matching network
High frequency plasma source with support for field coil, gas distribution and plasma jet extraction, has additional high frequency matching network
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机译：高频等离子体源，支持场线圈，气体分配和等离子体射流提取，并具有额外的高频匹配网络
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摘要
In the interior of the plasma source, there is an additional high frequency massing network (2)
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