首页> 外国专利> Process for structuring thin layers used for corrosion protection layers comprises applying a thin film as sol to substrate, hardening, removing hardened film, and converting into the required solid body state by introducing energy

Process for structuring thin layers used for corrosion protection layers comprises applying a thin film as sol to substrate, hardening, removing hardened film, and converting into the required solid body state by introducing energy

机译:构造用于腐蚀防护层的薄层的方法包括将薄膜作为溶胶施加到基底上,硬化,去除硬化的膜,并通过引入能量转化为所需的固态

摘要

Process for structuring thin layers using a sol-gel method comprises applying a mask to a substrate, applying a thin film as sol, hardening, removing the hardened film, and converting it into the required solid body state by introducing energy. Process for structuring thin layers using a sol-gel method comprises applying a mask (2) to a substrate (1) containing recesses on sites to be coated; applying a thin film (3) as sol onto the whole surface of the substrate covered with the mask; hardening the sol film; removing the hardened sol film only on the mask surface (4) by removing the mask; and converting the hardened sol film into the required solid body state by introducing energy. Preferred Features: The thin layers are photolithographically applied. An organometallic sol containing metal alcoholates or metal salts is used. One or more organic or inorganic compounds are added to the sol to stabilize it. The sol is applied by immersing, spin coating, spraying, daubing, or by using an electrophoretic method. The sol is converted into a gel film on hardening.
机译:使用溶胶-凝胶法构造薄层的工艺包括:将掩模施加到基板上,以溶胶形式施加薄膜,硬化,去除硬化膜,以及通过引入能量将其转变成所需的固态。使用溶胶-凝胶法构造薄层的方法包括:将掩模(2)施加到在要涂覆的位置上具有凹槽的基板(1)上;在覆盖有掩模的基板的整个表面上涂覆溶胶(solder)薄膜(3);硬化溶胶膜;通过去除掩模仅去除掩模表面(4)上的硬化溶胶膜;通过引入能量将硬化的溶胶膜转变成所需的固态。优选的特征:薄层是光刻法施加的。使用含有金属醇盐或金属盐的有机金属溶胶。将一种或多种有机或无机化合物添加到溶胶中以使其稳定。通过浸渍,旋涂,喷涂,涂抹或通过使用电泳方法来施加溶胶。固化后,溶胶转化为凝胶膜。

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