Conveyor for spherical body e.g. ball-shaped semiconductor, includes carrier to transport spherical body into spherical body storage, and sending unit to discharge spherical body from storage

摘要

A carrier (41) transports a spherical body (70) into a spherical body storage (42). The sending unit (43) takes out the spherical body from the storage. The carrier includes a carrier pipe (44) connected to a suction hole (46), which in turn connects a suction source (47). The suction hole attracts the spherical body while moved in the carrier pipe. The spherical body storage has a rotary board (49) with spherical body holding holes (48) on its circumference. The sending unit includes a sending pipe (51) connected to an air ejection hole (53), which in turn connects an air supply source (54).