Tunable micromechanical HF capacitor has movable electrode supported by suspension device providing electrode displacement in response to supplied control signal

摘要

The HF capacitor has 2 fixed electrodes (102a,102b) provided with HF input and output connections respectively and a facing relatively movable electrode (104), supported by a suspension device (106,108), controlled by a supplied control signal, for displacement of the movable electrode, which is electrically insulated from the suspension device.