STANDARD FOR CALIBRATION AND REVIEW OF A SURFACE INSPECTION COURT AND PROCEDURE FOR ESTABLISHING THE STANDARD

摘要

The invention relates to a reproducible standard for calibrating and checking the bright-field channel of a surface inspection device used for examining the flat surface of a sample and to a method for producing said standard whereby a microstructure is produced on a surface of a substrate provided as a standard, characterized in that the microstructure is smoothed out.