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Electron beam source, and method for manufacturing the same, electron beam sources device and an electron beam apparatus with the use of the same
Electron beam source, and method for manufacturing the same, electron beam sources device and an electron beam apparatus with the use of the same
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机译:电子束源及其制造方法,电子束源装置以及使用该电子束源的电子束装置
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摘要
PURPOSE: To provide an electron beam source which can generate electron beam of a unicolor and high brightness. ;CONSTITUTION: An electron forming means, e.g. a doped Si layer 2, to generate electrons in a conduction band is formed near the tip surface of a needle like structure 1 having a sharp tip part and made of a substance at least the surface of which is a semiconductor single crystal or single crystal insulating substance. It is preferable to form a surface passivation layer 4 on the surface of the needle-like structure 1. Furthermore, a means to excite electrons in a valence electron band may be formed instead of the doped Si layer 2.;COPYRIGHT: (C)1996,JPO
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