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Plasma reactor with coil antenna of plural helical conductors with equally spaced ends
Plasma reactor with coil antenna of plural helical conductors with equally spaced ends
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机译:等离子反应器,带有螺旋天线的线圈天线,螺旋天线的末端等距分布
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摘要
The invention is embodied in a coil antenna for radiating RF power supplied by an RF source into a vacuum chamber, the coil antenna including plural helical conductors each having a first end and a second end, the first ends being adapted for connection to a first common RF potential, the second ends being adapted for connection to a second common RF potential, each of the plural conductors being wound about a common axis of helical symmetry, each of the second ends being spaced substantially equally from the axis and from each other.
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