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Electrode assembly, cathode device and plating apparatus including an insulating member covering an internal circumferential edge of a cathode member
Electrode assembly, cathode device and plating apparatus including an insulating member covering an internal circumferential edge of a cathode member
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机译:电极组件,阴极装置和电镀装置,包括覆盖阴极构件的内周缘的绝缘构件
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摘要
An electrode assembly, including a cathode member is provided with a hole enclosed by a frame portion and a contact surface that comes into contact with an object to be plated at one surface of the frame portion. The cathode member include a conductive material such as copper plate. The cathode member is provided with a lead conductor. An insulating member is provided with holes and enclosed by frame portions, with the frame portions and placed on another surface of the frame portion of the cathode member. The frame portion of the first insulating member covers the internal circumferential edge of the cathode member over a width W1.
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