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Resonant sensor and method of making a pressure sensor comprising a resonant beam structure
Resonant sensor and method of making a pressure sensor comprising a resonant beam structure
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机译:谐振传感器和制造包括谐振梁结构的压力传感器的方法
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摘要
A resonant microbeam pressure sensor is disclosed, comprising a microbeam suspended in a diaphragm in at least one point by suspension elements. Pressure applied to the diaphragm will cause the resonance frequency of the beam to shift. This shift is detectable and proportional to the pressure. The device is manufactured by surface micromachining.
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