首页>
外国专利>
Specimen preparation by focused ion beam technique
Specimen preparation by focused ion beam technique
展开▼
机译:聚焦离子束技术制备样品
展开▼
页面导航
摘要
著录项
相似文献
摘要
A method for preparing small area parallel lapping specimens by a focused ion beam technique is disclosed in which a multiple-staged ion beam milling process is used to prepare a specimen for microscopic examination. The method may be carried out by first providing a high current ion beam for removal of a top surface of a specimen exposing a surface that immediately covers the characteristic feature to be examined to define a small window area that contains the characteristic feature. The present invention novel method may further be combined with a wet etching step after the ion beam milling process is completed. In the wet etching step, a three dimensional surface containing the characteristic feature to be examined is revealed which can then be observed under a scanning electron microscope.
展开▼