Sealed container, storage apparatus, electronic part conveyance system, and method of storage and conveyance of electronic parts

摘要

To provide a sealed container, a storage apparatus, an electronic part conveyance system and methods of storage and conveyance of an electronic part able to inhibit growth of a native oxide film on the electronic part without an excessive supply of an inert gas.;A sealed container storing an electronic part inside it and maintaining the inside at an inert gas atmosphere, including an oxygen concentration meter, a moisture concentration meter, a clock means for measuring an elapsed time from when storing the electronic part in the inside, a means for calculating integrals of concentration of oxygen and concentration of moisture with respect to time, a judging means for comparing the integrals with predetermined reference values (thresholds) set in advance and judging their magnitudes compared with the thresholds, and an alarm means for warning that at least one of the integral of the concentration of oxygen and the integral of the concentration of moisture has exceeded the threshold, and methods of storage and conveyance of an electronic part using the same.