Request predictive control system for high efficiency ultra-purity fluid heater

摘要

(57) the SUMMARY housing, and a resistive heating element provided in the fluid passage near to heat one fluid passageway (32), the operating fluid flowing (32) a fluid passageway at least through the housing The control system line (44) ultra-pure deionized water (UPDI) Heater (10) is described. A mechanism for determining the real power value indicates the power being applied to the heating element, the control system (10) achieves (30) a fluid outlet temperature is substantially equal to a preset fluid temperature can be selected by the user a mechanism for adjusting the power applied to the resistive heating element based on the offset between the required power value and a mechanism for determining the required power value that indicates the power required for, and the real power value, and the offset I have, and a mechanism to invalidate the adjusting means to a predetermined level greater than.