Reflection measurement system for locking the removal of the system noise and to compensate for specimen holder topography

摘要

(57) [Abstract] Autonomous system uses a light reflectance to obtain information about the sample to inspect the intensity of the colored spot of the device membrane surrounded by the background area, to produce a spot. Alternately, a master clock (270) drives the LED of the two drives one LED was focused to a spot centered on (280), and was focused on the background area next.