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Methods for their preparation magnetoresistance devices, and giant magnetoresistance devices
Methods for their preparation magnetoresistance devices, and giant magnetoresistance devices
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机译:制备磁阻器件的方法和巨磁阻器件
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摘要
(57) the production method of (30) magnetoresistive sensor using an electrochemical deposition SUMMARY magnetoresistive sensor (30) is disclosed. Electrochemical deposition, ie in order to prepare the insulating substrate for electroplating, insulating substrate (11) is coated with a conductive coating (12). In order to prevent short-circuiting metal region, a conductive coating (112) is patterned after. Conductive coating is electroplated with a metal alloy magnetic layer (131). To form a sensor capable of detecting the change the applied magnetic field (100), by etching these layers, to form separate regions of the four are interconnected Wheatstone bridge (473) located . In some embodiments, in order to enhance the sensitivity of the sensor, the magnetic layer are separated by (114) non-magnetic layer. In another embodiment, in order to concentrate the magnetic field in two of the four regions, the pole piece element is added.
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