首页> 外国专利> Methods for their preparation magnetoresistance devices, and giant magnetoresistance devices

Methods for their preparation magnetoresistance devices, and giant magnetoresistance devices

机译:制备磁阻器件的方法和巨磁阻器件

摘要

(57) the production method of (30) magnetoresistive sensor using an electrochemical deposition SUMMARY magnetoresistive sensor (30) is disclosed. Electrochemical deposition, ie in order to prepare the insulating substrate for electroplating, insulating substrate (11) is coated with a conductive coating (12). In order to prevent short-circuiting metal region, a conductive coating (112) is patterned after. Conductive coating is electroplated with a metal alloy magnetic layer (131). To form a sensor capable of detecting the change the applied magnetic field (100), by etching these layers, to form separate regions of the four are interconnected Wheatstone bridge (473) located . In some embodiments, in order to enhance the sensitivity of the sensor, the magnetic layer are separated by (114) non-magnetic layer. In another embodiment, in order to concentrate the magnetic field in two of the four regions, the pole piece element is added.
机译:(57)使用电化学沉积的(30)磁阻传感器的制造方法。发明内容本发明公开了一种磁阻传感器(30)。电化学沉积,即,为了准备用于电镀的绝缘基板,在绝缘基板(11)上涂覆导电涂层(12)。为了防止金属区域短路,之后对导电涂层(112)进行构图。导电涂层电镀有金属合金磁性层(131)。为了形成能够检测施加的磁场的变化的传感器(100),通过蚀刻这些层,以形成四个的单独区域,互连的惠斯通电桥(473)被定位。在一些实施例中,为了增强传感器的灵敏度,磁性层被(114)非磁性层隔开。在另一个实施例中,为了将磁场集中在四个区域中的两个中,增加了极靴元件。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号