METHOD FOR PRODUCING SILICON CARBIDE AND METHOD FOR DISPOSING WASTE SILICON SLUDGE

摘要

PROBLEM TO BE SOLVED: To provide a method for producing SiC by which high purity SiC can be obtained from waste silicon sludge and which enables effective utilization of waste silicon sludge, and to provide a method for disposing waste silicon sludge.;SOLUTION: Carbon black powder in an amount of 1.5 mol is added to 1 mol of waste silicon sludge in terms of slid part, pressure formed and externally heated by an electric furnace at 950°C for 2 hours in the atmosphere. From the XRD pattern of the sample, it is observed that peaks of Si and C are large before heating while they both decrease and a peak of SiC increase after heating, which proves that SiC can be produced from waste silicon sludge.;COPYRIGHT: (C)2002,JPO