THREE-DIMENSIONAL SHAPE MEASURING DEVICE BY PHASE SHIFT METHOD

摘要

PROBLEM TO BE SOLVED: To provide a three-dimensional shape measuring device capable of measuring the three-dimensional shape of an object surface having a large area highly accurately at high speed by using a phase shift method.;SOLUTION: Line illumination 4 having a sine wave-shaped intensity distribution is projected in the axial direction of an inspection object 3 by using an illumination unit 2. The place where the sine wave-shaped line illumination 4 is projected on the inspection object 3 is imaged by using a line sensor camera 1 having pixels arranged in the axial direction of the inspection object 3. The whole surface of the inspection object 3 is imaged by rotating the inspection object 3 by an inspection object driving motor 5, and the three-dimensional shape of the inspection object 3 is measured by the phase shift method.;COPYRIGHT: (C)2002,JPO