PURPOSE: To obtain a mechanism for rough motion and fine motion which is used for precise positioning, by providing a moving member, a pair of expansion-contraction elements for movement and a pair of clamp means. ;CONSTITUTION: When a voltage of 100V is impressed on a clamp element 64 on the left side and a voltage of 50V is impressed on elements 62 and 62' for movement, for instance, a moving member 1 and a block 63' are moved to the right while a block 63 held down by the clamp element 64 acts as a fixed part. The voltage of 100V is impressed on a clamp element 64' on the right side and the block 63' is put in a clamped state, while the impression voltage on the clamp element 64 on the left side is made 0V. The impression voltage on the elements 62 and 62' for movement is made 0V. Then the moving member 1 and the block 63 are moved to the left while the block 63' is made the fixed part, and thereby rough motion can be conducted. The voltage of 100V is applied to the clamp elements 64 and 64' and thereby the blocks 63 and 63' are held down inside a frame. A voltage from 50V to 100V is applied to the element 62 for movement and a voltage from 50V to 0V is applied to the element 62' for movement, for instance. Then the moving member moves in the right direction and fine motion can be conducted.;COPYRIGHT: (C)1993,JPO&Japio
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