Being the tremor feature which has tremor feature and the vibrating body containment

摘要

PROBLEM TO BE SOLVED: To provide a jogging mechanism, which is equipped with an ultrasonic motor that enables positioning in the submicron order, and to provide a vibrator-holding mechanism.;SOLUTION: The jogging mechanism equipped with an ultrasonic motor is of a stereoscopic form which has an anchor block 1; a mobile object 3 which is supported shiftably in the direction of a shifting axis to the anchor block 1; a vibrator 8 which is of stereoscopic form that has a first plane provided with two projections 9 and a second plane parallel with the first plane which is a plane parallel with the shifting direction and excites a plurality of vibration modes by the application of a high-frequency voltage signal; and a holding member 5 which holds the vibrator 8 to the anchor block 1. The holding member 5 is fixed to one part of the second plane of the vibrator 8 and is integrally constituted of high-rigidity material which does not contain a high nonlinear element that includes at least either a frictional sliding part or a rubber member.;COPYRIGHT: (C)2008,JPO&INPIT