Alignment feature and vacuum central processing unit null of the glass substrate for LCD

摘要

PROBLEM TO BE SOLVED: To simultaneously align two glass substrates for an LCD. ;SOLUTION: In a load lock chamber 2, buffers 11 and 12 for placing both side edges of the rear surface of a glass substrate P for an LCD are provided at upper and lower parts. Positioners 21 and 22 are arranged on the extension line of the diagonal line of the glass substrate P for LCD, while they face each other. The positioners 21 and 22 have pairs of rollers 21a and 21b, and 22a and 22b that can be freely brought into contact with a part near the corner part of each glass substrate P for LCD. The rollers 21a, 21b, 22a, and 22b are freely movable vertically, and at the same time can be moved freely on the diagonal line of the glass substrate P for LCD. The entire height of the rollers 21a, 21b, 22a, and 22b is larger than the upper and lower spacing of the glass substrate P for LCD.;COPYRIGHT: (C)2000,JPO