Porous silicon luminous element and porous silicon light absorbent element and those production methods

摘要

PURPOSE:To perform a new development of an optically functional material of light receiving and emitting elements, etc., by forming light emitting porous silicon made of porous silicon having fine pores on a surface of a substrate made of a silicon single crystal. CONSTITUTION:A p-type Si wafer in ohmic contact (Al) with a rear surface is anodically reacted to form a porous silicon (PS) layer 3 having fine porous pores 2 on a surface of a silicon single crystalline substrate 1. Its thickness is about 40mum, and its mean diameter is about 12nm. Thus, an entirely new optically functional material such as an EL, an LED, an LD, a laser oscillator OEIC, etc., as a light emitting element, further a light receiving element, etc., is realized.