Low pressure air particulate sampling system and particulate instrumentation system and chemical reaction device and CVD device and etching device

摘要

PURPOSE:To realize a minute-particle sampling system, in the low-pressure air, wherein a gas which contains minute particles is sampled from a low- pressure reaction chamber and it is sent out at a steady flow rate and at atmospheric pressure. CONSTITUTION:A system is constituted of a low-pressure sampling system 1, of a volume-variable storage container 2, of a vacuum evacuation system, of a clean-gas supply system, of a pressure and temperature, detection mechanism and of a computer system 4. A pressure inside the low-pressure sampling system is lowered by a reaction chamber 26, and a gas containing minute particles is sampled. The gas containing the minute particles is diluted with a clean gas 9, it is returned to atmospheric pressure, it is then sent to a volume- variable storage chamber 2 and it is sent to a minute-particle analyzer 28.