Alignment film evaluation device and an alignment film evaluation method

摘要

PURPOSE: To provide an oriented film evaluating device capable of evaluating the orientational property of an oriented film with high accuracy by measuring the two-color difference of the oriented film with high sensitivity without rotating a substrate and the polarization state as well in a device for measuring the light absorption of the oriented film by allowing light polarized in the S polarization state to reflect to the substrate with the oriented film formed thereon. ;CONSTITUTION: The oriented film evaluating device is provided with a releasing means 1 for releasing an infrared ray, a polarizing means 4 for polarizing the infrared ray released from the releasing means, a dividing means 5 for dividing the polarized light into 2 optical pathes, an irradiating means 6 and 7 for irradiating the oriented film with respective polarized lights divided into 2 optical pathes, a detecting means 14 for detecting respective linearly polarized light rays transmitted through the oriented film and an evaluating means for determining the difference in the light absorption degrees of the oriented film in the respective polarizing directions from the flared ray detected by this detecting means and evaluating the orientational ability of the oriented film.;COPYRIGHT: (C)1996,JPO