Apparatus for detecting physical quantity using change in distance between electrodes and operation test method thereof

摘要

PROBLEM TO BE SOLVED: To test the operation of a device for detecting physical quantity with a simple method. SOLUTION: A flexible substrate 320 consisting of a central operation part 321, a flexible part 322 that is made of the surrounding thin part, and its surrounding fixed part 323 is allowed to oppose a fixed substrate 310, so that the operation part 321 can be displaced by the operation of acceleration. A capacitance element is composed of a displacement electrode 25 that moves with the operation part 321 and a fixed electrode 15, and a detection means for detecting the component in the direction of the Z axis of acceleration based on the capacitance of the capacitance element is provided. Also, a voltage is applied between the displacement electrode 25 and the fixed electrode 15 for operating Coulomb force, and the output of the detection means is monitored to test the operation of the direction of Z axis while the operation part 321 is forcibly displaced in the direction of Z axis. The acceleration in the directions of X and Y axes can be detected and the operation can also be tested by other electrodes.