HOLDER AND HOLDING METHOD FOR SHEET-LIKE MEASURED OBJECT, INSPECTION DEVICE AND INSPECTION METHOD FOR CUT FACE OF QUARTZ PLATE, AND MEASURING INSTRUMENT AND MEASURING METHOD FOR FLATNESS OF SHEET-LIKE MEASURED OBJECT

摘要

PROBLEM TO BE SOLVED: To properly measure or inspect a sheet-like measured object with high accuracy at all times by supporting the object in a proper posture to prevent a deformation such as warp, in the case of non-contact measurement or inspection.;SOLUTION: This holder having a rectangular block-shaped wafer support pedestal 20 is provided with an oval recessed portion 21 on its upper surface, and a water supplying/ draining port 22 opened in the middle of the bottom surface of the recessed portion is connected to a pump 23 and a feed water tank 24 via a pipeline. When it is used, a quartz wafer is disposed on the bottom surface of the recessed portion, and a prescribed amount of water 25, preferably pure water, is infused thereinto to float the quartz wafer on the surface of water by its surface tension. In this state of things, the inclination angle of a cut face of the quartz wafer and the flatness of its surface, for example, are measured, then the water is drained from the recessed portion by reversely rotating the pump, and the quartz wafer is taken out. If the bottom surface of the recessed portion is formed into a wave-shaped surface 29, the quartz wafer can be easily taken out since it is in no danger of sticking to the bottom surface owing to the surface tension of water when the water is drained.;COPYRIGHT: (C)2002,JPO