SHEET-LIKE OBJECT DEFECT INSPECTION LIGHTING, SHEET-LIKE OBJECT DEFECT INSPECTION DEVICE AND SHEET-LIKE OBJECT DEFECT INSPECTION METHOD

摘要

The present invention includes: an elongated light application unit that applies illumination light to a sheet-shaped object and has a longitudinal direction extending in a width direction of the sheet-shaped object; a first light shielding unit that is located on a light path from the light application unit to the sheet-shaped object, the first light shielding having light shielding sections and opening sections alternately arranged in a direction parallel to the longitudinal direction of the light application unit; and a second light shielding unit that is located, between the first light shielding unit and the sheet-shaped object, on the light path from the light application unit to the sheet-shaped object, the second light shielding unit having light shielding sections and opening sections alternately arranged in a direction parallel to the longitudinal direction of the light application unit. The opening sections of the first light shielding unit are located between the light shielding sections of the second light shielding unit and the light application unit, and the opening sections of the first light shielding unit have a smaller length in the direction parallel to the longitudinal direction of the light application unit than the light shielding sections of the second light shielding unit have.