PROBING DEVICE AND PROBING SHEET STRUCTURE IN ELECTRIC CHARACTERISTIC INSPECTION DEVICE, AND MANUFACTURING METHOD OF PRINTED WIRING BOARD WITH PYRAMID BUMP

摘要

PROBLEM TO BE SOLVED: To provide a probing device and a probing sheet structure in an electric characteristic inspection device capable of executing highly accurate probe measurement with a reduced loss of a high-frequency characteristic to electronic parts such as a SAW filter or the like.;SOLUTION: This probing device is equipped with the probe sheet structure 30 constituted by being equipped with a printed wiring board 42 having surface and back wiring patterns 48 (60a, 62a), 46 (60b, 62b) connected by through holes 48a, 48b, where pyramid bumps (50a, 50b) for a signal and the ground are formed on the back patterns and the pyramid bumps for the signal and the pyramid bumps for the ground are connected to a coaxial connector 34 for input/output of the signal through the corresponding back patterns, the through holes and the surface patterns respectively.;COPYRIGHT: (C)2002,JPO