THIN FILM HAVING FINE PORE STRUCTURE AND METHOD FOR MANUFACTURING FINE PORE STRUCTURAL BODY

摘要

PROBLEM TO BE SOLVED: To prepare a thin film of a tin oxide meso structural body provided with a fine pore structure having high structural regularity and a crystalline fine pore wall, and to provide a manufacturing method thereof.;SOLUTION: The thin film has the fine pore structure formed by containing an oxide, holds a surfactant in the fine pore and contains tin oxide crystal in the fine pore wall. The manufacturing method for the fine pore structural body has a process for preparing a reaction solution containing a metallic compound and the surfactant, a process for applying the reaction solution on a substrate and a process for holding the substrate in an atmosphere containing steam.;COPYRIGHT: (C)2002,JPO