首页>
外国专利>
Inspection manner null of implemental being completed
Inspection manner null of implemental being completed
展开▼
机译:检查方式为实施完毕
展开▼
页面导航
摘要
著录项
相似文献
摘要
PURPOSE: To inspect a board even when mounted parts are at a blind spot of a reflecting light in an apparatus which inspects a surface shape of the board by scanning the mounted printed board with fine beams and receiving the reflecting light, of fine beams by a photoelectric converting element. ;CONSTITUTION: Fine beams from a light source 1 are deflected by a polygon mirror 3 to scan over a substrate 7. A reflecting light from an irradiated position is received by four photoelectric converting elements 12, 13, 14, 15. Although one of the photoelectric converting elements enters a blind spot in the vicinity of a mounted part, it is distinguished from a difference of luminance, namely, a difference of the detecting amount of light, thereby to inspect the substrate.;COPYRIGHT: (C)1995,JPO
展开▼