SHAPE SIMULATION METHOD AND COMPUTER-READABLE RECORDING MEDIUM WITH PROGRAM FOR SHAPE SIMULATION STORED THEREON

摘要

PROBLEM TO BE SOLVED: To provide shape simulation in a shortened calculation time, without decreasing accuracy in the simulation, and a record medium when calculating the change in the shape of an object to be subjected to reaction caused by allowing a reactant to collide with the object to be subjected to a reaction by the shape simulation.;SOLUTION: In this shape simulation method, the reactant collides with a trench on the surface of a silicon substrate surface, thus allowing the reactant to adhere onto the surface, scrapping the surface off, and thus calculating the shape of the silicon substrate and the internal wall of the trench after the collision of the reactant. The process of reaction of collision, adhesion, or the like is calculated by a radio city matrix according to the radio city method. When the radio city matrix is to be created, those which perform reaction for influencing each other between reactants, are set to one radio city matrix, and those which do not perform reaction each other are set to the radio city matrix for calculation, thus reducing calculation time without decreasing the result accuracy.;COPYRIGHT: (C)2002,JPO