METHOD AND APPARATUS FOR ANALYSIS OF TRACE IMPURITY IN GAS

摘要

PROBLEM TO BE SOLVED: To provide a method and an apparatus, for the analysis of trace impurities in a gas, wherein the concentration of the trace impurities in the sample gas, especially the concentration of a nonmethane organic compound, can be quantitatively determined simply and with high sensitivity and also the concentration of carbon monoxide in nitrogen can be quantitatively determined.;SOLUTION: In a state that a component whose ironization potential is between methane and an organic compound, to be measured, (nonmethane organic compound) other than the methane exists in the sample gas, a drift voltage which is applied to electrodes at both ends of a differential pumping part is controlled. Carbon ions at an atomic level are dissociated from the nonmethane organic compound. On the basis of the ionic strength of the carbon ions, the nonmethane organic compound is quantitatively determined.;COPYRIGHT: (C)2002,JPO