MAGNETORESISTANCE EFFECT ELEMENT AND MANUFACTURING METHOD THEREOF, MAGNETORESISTANCE EFFECT TYPE MAGNETIC HEAD AND MANUFACTURING METHOD THEREOF, AND MAGNETIC RECORDING/REPRODUCING EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a magnetoresistance effect element together with its manu facturing method having a good magnetoresistance ratio dR/R which is excellent in corrosion-resistance, thermal stability, and ESD-resistance characteristics, a magnetoresistance effect type magnetic head together with its manufacturing method, and a magnetic recording/reproducing equipment.;SOLUTION: On a board 2, there are provided an anti-ferromagnetic layer 9 of anti-ferromagnetic material having a crystal structure of face-centered tetragonal system, a pin layer 11, a spacer layer 5, and a free layer 4. The pin layer 11 has a first ferromagnetic layer 8 hitting the anti-ferromagnetic layer 9, a non-magnetic layer 7, and a second ferromagnetic layer 6 laminated. Among the layers, the crystal particle sizes of only the anti-ferromagnetic layer 9, the first ferromagnetic layer 8, and the non-magnetic layer 7 are 50 nm or less.;COPYRIGHT: (C)2001,JPO