METHOD AND SYSTEM FOR CREATING MASTER LIBRARY OF DIFFRACTION GRATING PROFILE AND SYSTEM FOR CREATING RUN- TIME LIBRARY OF DIFFRACTION GRATING PROFILE

摘要

PROBLEM TO BE SOLVED: To provide a method and a system for creating the library of a diffraction grating profile relating to the creation and use of the library of a diffraction grating profile so that the method and the system can respond to both of the long-term requirement and the short-term requirement of clients.;SOLUTION: The method for creating the master library of the diffraction grating profile includes a step of determining a parameter set of a plurality of dimensions of a diffraction grating and a step of compiling the master library of the diffraction grating profile. The diffraction grating profile contains the data representing the combination of the dimension of the diffraction grating in the determined parameter set and the spectrum data calculated to correspond to the diffraction grating. The system for creating the master library is equipped with a memory medium 22 to store master library, a computer 18 connected to the memory medium and a compiler 24 operating in the computer to create the master library.;COPYRIGHT: (C)2002,JPO