In2O3-SnO2 PRECURSOR APPLICATION LIQUID AND ITS PREPARATION AS WELL AS PROCUDING METHOD OF In2O3-SnO2 THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a method of preparing an application liquid, allowing the preparation of the application liquid having superior stability, high purity and improved film forming performance for facilitating the increase of a film thickness and the formation of a high-grade ITO thin film, when forming the ITO thin film on the surface of a substrate using a sol-gel method.;SOLUTION: Indium nitrate and tin alkoxide as starting as starting materials are dissolved and reacted using one or two types or more of solvent selected from the groups consisting of ethylene glycol, ethylene glycol monoalkylether, propylene glycol and propylene glycol monoalkyleter, and then an organic high polymer is added to an obtained solution.;COPYRIGHT: (C)2001,JPO