METHOD FOR MEASURING THICKNESS OF INTER-METALLIC COMPOUND USING EPMA METHOD, AND METHOD FOR MEASURING SOLID SHAPE OF INTER-METALLIC COMPOUND USING THE SAME

摘要

PROBLEM TO BE SOLVED: To define correspondence between inter-metallic compounds and defects by measuring and estimating the thickness and solid shape of the inter-metallic compounds, in addition to distinguishing them and measuring their plane sizes.;SOLUTION: In the method of measuring the thickness and solid shape of the inter- metallic compound containing a plurality of constituent metals by EPMA, one point of measurement or a plurality of points of measurement on the inter-metallic compound are irradiated with an electron beam. Characteristic X-ray intensity excited by the irradiation with the electron beam at each point of measurement from the metal to be measured is measured. The relative X-ray intensity ratio of the metal to be measured at each point of measurement is computed from the measured characteristic X-ray intensity. From the relative X-ray intensity ratio of the metal to be measured at each point of measurement and the relationship between the relative X-ray intensity ratio of the metal to be measured and thickness obtained by the Monte Carlo simulation method, the thickness of the metal to be measured at each point of measurement is obtained or from the distribution of the points of measurement and the thickness at each point of measurement, the solid shape of the inter-metallic compound is measured by this method.;COPYRIGHT: (C)2002,JPO