FILTER MEDIUM FOR CHEMICAL FILTER AND CHEMICAL FILTER UNIT

摘要

PROBLEM TO BE SOLVED: To provide a filter medium for a chemical filter and a chemical filter unit, which are used in a clean room or the like for removing an acid or alkaline gas particularly and do not affect an article or the like adversely in the clean room and from which a gaseous contaminant is not generated or, if any, the amount of the contaminant to be generated is made extremely small.;SOLUTION: This chemical filter unit is constituted by using the filter medium obtained by laminating a physical adsorption layer for adsorbing contaminants to be generated from an ion exchange resin layer on the downstream side of the ion exchange resin layer. A cover material from which the amount of the gaseous contaminant to be generated is made small can be arranged on the downstream side of the physical adsorption layer.;COPYRIGHT: (C)2002,JPO