METHOD OF MANUFACTURING MICRO OPTICAL ELEMENT, MICRO OPTICAL ELEMENT MANUFACTURED BY THE METHOD, AND OPTICAL DEVICE USING THE ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing micro optical element by which high-accuracy micro-working can be performed on a micro optical element by suppressing the occurrence of the drift of an ion beam caused by an abrupt change in electrostatic charge in the course of working (FIB working) which is performed by using a converged ion beam, and to provide a micro optical element manufactured by the method and an optical device using the optical element.;SOLUTION: The method of manufacturing micro optical element in which openings smaller than the wavelength of light are formed includes a step of preparing an object to be worked having at least a conductive light shielding film and an insulating light transmitting substrate and a step of forming the openings smaller than the wavelength of light at desired positions by etching the conductive light shielding film partway in the thickness direction of the film by projecting a converged ion beam upon the object to be worked.;COPYRIGHT: (C)2003,JPO