SQUARENESS MEASURING INSTRUMENT, SQUARENESS MEASURING METHOD, SQUARENESS MEASURING PROGRAM, AND COMPUTER- READABLE STORAGE MEDIUM FOR STORING THE SAME PROGRAM

摘要

PROBLEM TO BE SOLVED: To highly accurately measure the squareness of apex angles in the case of an array-like tested object having a plurality of right-angled apex angle parts.;SOLUTION: Laser beam generated by a laser beam source 11 is transmitted by an objective lens 12 of a microscope and then converted into parallel light by a collimator lens 14. The parallel light is branched into reference light reflected by a transmission-type referential planar plate 17 and irradiation light to the tested object 20. Reflected light reflected by a surface of the object 20 after the irradiation thereof is transmitted by the plate 17 and returns along the same optical path. The reference light reflected by the plane 17 and body light reflected from the object 20 are turned into convergent light by the collimator lens 14, and it is perpendicularly branched out by an optical path branching means 13 to come into an interference fringe detection means 15. A detected interference fringe is analyzed by an arithmetic processing means 16, thereby obtaining the result of shape measurement of a planar surface.;COPYRIGHT: (C)2002,JPO