ON-LINE MEASUREMENT METHOD AND DEVICE OF AMOUNT OF ADHESION OF METAL PHASE CONTAINED IN PLATED LAYER

摘要

PROBLEM TO BE SOLVED: To improve the measurement accuracy of the amount of adhesion of a metallic phase by improving X-ray diffraction intensity from the metallic phase in a method for measuring the amount of adhesion of the metallic phase contained in a plated layer using the X-ray diffraction method. SOLUTION: By measuring diffraction X rays from the metallic phase contained in the plated layer with a specific range on a Debey ring by the X rays, the number of count of the diffraction X rays per measurement time by a detection means is increased. Also, by integrating the obtained diffraction X-ray intensity data, the X-ray intensity data are improved and hence the measurement accuracy of the amount of adhesion of the metallic phase is improved.