APERTURE MANUFACTURING EQUIPMENT AND METHOD OF SURFACE EMITTING LASER (VCSEL) BY SELECTIVE OXIDATION METHOD

摘要

PROBLEM TO BE SOLVED: To provide an aperture manufacturing equipment and a method of a surface emitting laser by selective oxidation method wherein change of a resonance wavelength is observed by using an optical spectrum analyzer and an aperture manufacturing process can be monitored.;SOLUTION: This aperture manufacturing equipment is provided with a stage 21 on which a wafer 10 for the surface emitting laser having a preliminary oxide layer is mounted, a light source 31, and an optical spectrum analyzer 41 which is installed outside a furnace and receives a light reflected from the wafer, and can determine an aperture diameter from optical intensity change of a resonance peak wavelength which is caused by diameter change of the aperture formed in the preliminary oxide layer.;COPYRIGHT: (C)2001,JPO