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TAILORING NANOCRYSTALLINE DIAMOND FILM PROPERTIES
TAILORING NANOCRYSTALLINE DIAMOND FILM PROPERTIES
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机译:定制纳米晶金刚石膜的性能
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摘要
A method for controlling the crystallite size and growth rate of plasma-deposited diamond films. A plasma is established at a pressure in excess of about 55 Torr with controlled concentrations of hydrogen up to about 98% by volume, of unsubstituted hydrocarbons up to about 3% by volume and an inert gas of one or more of the noble gases and nitrogen up to about 98% by volume. The volume ratio of inert gas to hydrogen is preferably maintained at greater than about 4, to deposit a diamond film on a suitable substrate. The diamond film is deposited with a predetermined crystallite size and at a predetermined growth rate.
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